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Industry:(required) SEMICONDUCTOROPTICALMETALLURGICAL Other
Type Of Activity: Research & Development(R&D)Production
Primary Vacuum-Controlled Atmosphere Coating Processes Desired: Ion Vapor Deposition (IVD)Physical Vapor Deposition (PVD)Electron Beam (EB)SputteringIon Beam Assist Deposition (IBAD)Cathodic Arc Deposition (CAD)
Other
1. Film Materials/ Thicknesses (angstroms) a. / b. /
2. Which of these materials to be co-deposited, if any? a. b.
3. Substrate Material:
3a. Number of substrate sides to be coated:
4. Size of Substrates (required): inchesmillimeters Height by Width Thickness Diameter by Thickness
5. Estimated throughput quantity processed: /week
5a. Is this a new process for you? yesno
5b. If not a new process, what are you using now? Make/Model
6. Above throughput on 123 shift basis
7. Temperature of substrates: Preheatdeg. C Duringdeg. C
8. Type of high vacuum pumping: DiffusionCryopumpTurbomolecular Other
9. Automated Computer Control?yesno
9a. Automatic Vacuum System control only?yesno
9b. Manual control only?yesno
10. Desired vacuum level prior to process:torr
10a. Desired vacuum level during process:torr
11.Utilities available: VAC Phase Hz Water – CityWater – ChilledLiquid Nitrogen Compressed Airpsig
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